艾佩科（上海）气体有限公司
地 址：上海市闵行区纪翟路1199弄12栋5楼（樽轩工业区）
电 话：021-54153376，021-64783001
手 机：13795418000
传 真：021-64783002
邮 箱：Davidxu@apkgas.com
APK (Shanghai ) Gas Co.,Ltd
Address ：5F, Block 12 No.1199 Ji DiRoad, Minhang , Shanghai, 201107, CHINA
Tel: 0086 21 54153376
Fax: 0086 21 64783002
HP: 13795418000
Email：Davidxu@apkgas.com
| 前驱体材料 Precursor material | ||||
| 金属有机类 | ||||
| 英文名 | 化学式 | CAS号 | 别名 | 中文名 |
| Trimethyl Aluminum | C3H9Al | 75-24-1 | TMA | 三甲基铝 |
| Diethylzinc | Zn(C2H5)2 | 557-20-0 | DEZ | 二乙基锌 |
| Dimethylzinc | Zn(CH3)3 | 544-97-8 | DMZ | 二甲基锌 |
| Trimethylgallium | Ga(CH3)3 | 1445-79-0 | TMG | 三甲基镓 |
| Triethylgallium | Ga(C2H5)3 | 1115-99-7 | TEG | 三乙基镓 |
| Trimethylindium | C3H9In | 3385-78-2 | TMI | 三甲基铟 |
| Trimethylbismuth | (CH3)3Bi | 593-91-9 | TMB | 三甲基铋 |
| Trimethyl antimony | Sb(CH3)3 | 594-10-5 | TMSb | 三甲基锑 |
| Antimony triethy | Sb(C2H5)3 | 617-85-6 | TESb | 三乙基锑 |
| Diethylberyllium | Be(C2H5)2 | 542-63-2 | DEB | 二乙基鈹 |
| Di-t-butyltelluride | PhTeMgBr | 83817-35-0 | DTBT | 二叔丁基碲 |
| Diethvl tellurium | Te(C2H5)2 | 627-54-3 | TETe | 二乙基碲 |
| Diisopropyltellurium | C6H14Te | 51112-72-2 | DipTe | 二异丙基碲 |
| Tris(dimethylamido)gallium(III) | Ga(N(CH3)2)3 | 57731-40-5 | TDMAG | 三（二甲氨基）镓 |
| Tris(dimethylamido)antimony(III) | C6H18N3Sb | 7289-92-1 | TDMASb | 三（二甲胺）锑 |
| Tetrakis(diethylamion)hafnium | C8H24HfN4 | 19962-11-9 | TDMAH | 四（二甲胺）铪 |
| Ethanamine, N-methyl-,hafnium(4+) salt (4:1) | C12H32HfN4 | 352535-01-4 | TEMAH | 四（甲乙胺）铪 |
| N-methyl-N-[tris(dimethylamino)germyl]methanamine | C8H24GaN4 | 7344-40-3 | TDMAGe | 四（二甲胺）锗 |
| Tetrakis(dimethylamino)zirconium | C8H24N4Zr | 19756-04-8 | TDMAZ | 四（二甲胺）锆 |
| Tetrakis(ethylmethylamino)zirconium | C12H32N4Zr | 175923-04-3 | TEMAZ | 四（甲乙胺）锆 |
| N-methyl-N-[tris(dimethylamino)stannyl]methanamine | C8H24N4Sn | 1066-77-9 | TDMASn | 四（二甲胺）锡 |
| Tetrakis(dimethylamino)titanium | C8H24N4Ti | 3275-24-9 | TDMAT | 四（二甲胺）钛 |
| Ethyl(methyl)azanide,titanium(4+) | C12H32N4Ti | 308103-54-0 | TEMAT | 四（甲乙胺）钛 |
| Tetrakis(ethylmethylamino)vanadium | C12H32N4V | 791114-66-4 | TEMAV | 四（甲乙胺）钒 |
| Tantalum(5+) ethanolate | C10H30O5Ta | 6074-84-6 | PETOTa | 乙氧基钽 |
| Pentakis(dimethylamino)tantalum(V) | C10H30N5Ta | 19824-59-0 | PDMATa | 五（二甲胺）钽 |
| Ferrocene | C10H10Fe | 102-54-5 | FeCp2 | 二茂铁 |
| Magnesocene | C10H10Mg | 1284-72-6 | MgCp2 | 二茂镁 |
| Manganocene | C10H10Mn | 73138-26-8 | MnCp2 | 二茂锰 |
| Nickelocene | C10H10Ni | 1271-28-9 | NiCp2 | 二茂镍 |
| Ruthenocene | C10H10Ru | 1287-13-4 | RuCp2 | 二茂钌 |
| Cobaltocene | (η5-C5H5)2Co | 1277-43-6 | CoCp2 | 二茂钴 |
| bis(methylcyclopentadienyl)magnesium | C12H14Mg | 40672-08-0 | Mg(MeCp)2 | 二甲基二茂镁 |
| Bis(ethylcyclopentadienyl)magnesium | C14H18Mg | 114460-02-5 | Mg(EtCp)2 | 二乙基二茂镁 |
| 1,1'-Diethylmanganocene | C14H18Mn | 101923-26-6 | Mn(EtCp)2 | 二乙基二茂锰 |
| Bis(ethylcyclopentadienyl)ruthenium | C7H9RuC7H9 | 32992-96-4 | Ru(EtCp)2 | 二乙基二茂钌 |
| (Trimethyl)methylcyclopentadienylplatinum(IV) | C9H16Pt | 94442-22-5 | (MeCp)Pt(CH3)3 | 三甲基甲基环戊二烯基铂 |
| Lithium Dipivaloylmethanate | C11H19LiO2 | 22441-13-0 | Li(thd) | （四甲基庚二酮）锂 |
| (2,2,6,6-Tetramethyl-3,5-heptanedionato)silver | C11H19AgO2 | 79827-25-1 | Ag(thd) | （四甲基庚二酮）银 |
| Copper(II) hexafluoroacetylacetonate hydrate | Cu(C5HF6O2)2 | 155640-85-0 | Cu(hfac)2 | 二（六氟戊二酮）铜 |
| Palladium(II)hexafluoro-2,4-pentanedionate | C10H8F18O4Pd | 64916-48-9 | Pd(hfac)2 | 二（六氟乙酰丙酮）钯 |
| Iridium(III)2,4-pentanedionate | C15H21IrO6 | 15635-87-7 | Ir(acac)3 | 三（乙酰丙酮）铱 |
| Neodymium-thd | C33H60NdO6 | 15492-47-4 | Nd(thd)3 | 三（四甲基庚二酮）钕 |
| Tris(2,2,6,6-tetramethyl-3,5-heptanedionato)ytterbium(III) | C33H57O6Yb | 15492-52-1 | Yb(thd)3 | 三（四甲基庚二酮）镱 |
| Tetrakis(tetramethylheptanedionato)cerium | C22H38CeO4 | 18960-54-8 | Ce(thd)4 | 四（四甲基庚二酮）铈 |
| Tris(2,2,6,6-tetramethyl-3,5-heptanedionato)lanthanum(III) | C33H57LaO6 | 14319-13-2 | La（thd）3 | 三（四甲基庚二酮）镧 |
| Tris(tetramethylcyclopentadienyl)lanthanum | C27H39La | 148607-23-2 | La(MeCp)3 | 甲基环戊二烯镧 |
| Bis(trimethylsilyl)azanide,lanthanum(3+) | C18H54LaN3Si6 | 175923-07-6 | La(TMSA)3 | 三(二(三甲硅)胺)镧 |
| Lead(II)-2,2,6,6-tetramethyl-3,5-heptanedionate | C22H38O4Pb | 21319-43-7 | Pb(thd)2 | 二（四甲基庚二酮）铅 |
| Bismuth III Tetramethylheptanedionate | C33H57BiO6 | 142617-53-6 | Bi(thd)3 | 三（四甲基庚二酮）铋 |
| Erbium-DPM | C33H57ErO6 | 34750-80-6 | Er(thd)3 | 三（四甲基庚二酮）铒 |
| Tris(2,2,6,6-Tetramethyl-3,5-Heptanedionato)Yttrium(III) | C33H57O6Y | 15632-39-0 | Y(thd)3 | 三（四甲基庚二酮）钇 |
| Bis(N,N'-di-i-propylacetamidinato)cobalt(II) | (C8H17N2)2Co | 635680-58-9 | Co(iPr-MeAMD)2 | 二（N,N’-二异丙基乙脒基）钴 |
| Bis(N,N'-diisopropylacetamidinato) Nickel (II) | (C8H17N2)2Ni | 635680-62-5 | Ni(iPr-MeAMD)2 | 二（N,N’-二异丙基乙脒基）镍 |
| lanthanum tris(N,N'-diisopropylacetamidinate) | (C8H17N2)3La | 635680-72-7 | La(iPr-MeAMD)3 | 三（N,N’-二异丙基乙脒基）镧 |
| Yttrium tris(N,N'-diisopropylacetamidinate) | (C8H17N2)3Y | Y(iPr-MeAMD)3 | 三（N,N’-二异丙基乙脒基）钇 | |
| Molybdenum hexacarbonyl | Mo(CO)6 | 13939-06-5 | Mo(CO)6 | 六羰基钼 |
| (Trimethyl)methylcyclopentadienylplatinum (IV) | C9H16Pt | 94442-22-5 | Me3Pt(MeCp) | 三甲基甲基环戊二烯铂 |
| Tris(methylcyclopentadienyl)yttrium(III) | C18H21Y | 329735-72-0 | Y(MeCp)3 | 甲基环戊二烯钇 |
| Indium,(h5-2,4-cyclopentadien-1-yl)- | C5H5In | 34822-89-4 | InCp | 环戊二烯基铟 |
| Tin(IV) chloride | Cl4Sn | 7646-78-8 | Cl4Sn | 四氯化锡 |
| Titanium(IV) isopropoxide | C12H28O4Ti | 546-68-9 | TIPT | 四异丙醇钛 |
| Niohium pentaethnxidc | Nb(OC2H5)5 | 3236-82-6 | PETONb | 乙氧基铌 |
| Lithium t-butoxide | C4H9LiO | 1907-33-1 | TBOLi | 叔丁醇锂 |
| Iron t-butoxide | C12H27FeO3 | 620945-29-1 | 3TBOFe | 叔丁醇铁 |
| GALLIUM (III) ISOPROPOXIDE | C9H21GaO3 | 4452-61-3 | TPGa | 三异丙氧基镓 |
| Titanium tetrachloride | TiCl4 | 7550-45-0 | TiCl4 | 四氯化钛 |
| Carbon tetrachloride | CCl4 | 56-23-5 | CCl4 | 四氯化碳 |
| Carbon tetrabromide | CBr4 | 558-13-4 | CBr4 | 四溴化碳 |
| Pentachloropyridine | C5Cl5N | 2176-62-7 | PCP | 五氯吡啶 |
| boride compound | B compound | AMY-B-330 | 硼化合物 | |
| Germanium(Ⅳ) methoxide | C4H12GeO4 | 992-91-6 | 甲氧基锗 | |
| 硅基化合物 | ||||
| 英文名 | 化学式 | CAS号 | 别名 | 中文名 |
| Bis(t-butylamino)silane | ([NH(C4H9)]2SiH2) | 186598-40-3 | BTBAS | 双(叔丁基氨基)硅烷 |
| Tris(dimethylamino)silane | C6H19N3Si | 15112-89-7 | 3DMAS | 三（二甲氨基）硅烷 |
| N,N-Disilylsilanamine | H9NSi3 | 13862-16-3 | TSA | (N,N-二硅烷基-硅烷胺) |
| Bis(diethylamino)silane | C8H22N2Si | 27804-64-4 | BDEAS(SAM24) | 双（二乙胺基）硅烷 |
| Diisopropylaminosilane | C6H17NSi | 908831-34-5 | DIPAS(LTO-520) | 二（异丙氨基）硅烷 |
| Tetraethyl Orthosilicate | C8H22N2Si | 1978/10/4 | TEOS | 原硅酸乙酯 |
| Hexachlorodisilane | Si2Cl6 | 13465-77-5 | HCDS | 六氯乙硅烷 |
| Bis(trimethylsilyl)azanide,gadolinium(3+) | C18H54GdN3Si6 | 35789-03-8 | Gd(TMSA)3 | 三(二(三甲硅)胺)钆 |
