前驱体材料

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    APK (Shanghai ) Gas  Co.,Ltd

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      前驱体材料 Precursor material
金属有机类
英文名 化学式 CAS号 别名 中文名
Trimethyl Aluminum C3H9Al 75-24-1 TMA 三甲基铝
Diethylzinc Zn(C2H5)2 557-20-0 DEZ 二乙基锌
Dimethylzinc Zn(CH3)3 544-97-8 DMZ 二甲基锌
Trimethylgallium Ga(CH3)3 1445-79-0 TMG 三甲基镓
Triethylgallium Ga(C2H5)3 1115-99-7 TEG 三乙基镓
Trimethylindium C3H9In 3385-78-2 TMI 三甲基铟
Trimethylbismuth (CH3)3Bi 593-91-9 TMB 三甲基铋
Trimethyl antimony Sb(CH3)3 594-10-5 TMSb  三甲基锑 
Antimony triethy Sb(C2H5)3 617-85-6  TESb  三乙基锑 
Diethylberyllium Be(C2H5)2 542-63-2 DEB 二乙基鈹
Di-t-butyltelluride PhTeMgBr  83817-35-0  DTBT  二叔丁基碲 
Diethvl tellurium Te(C2H5)2  627-54-3  TETe  二乙基碲 
Diisopropyltellurium C6H14Te  51112-72-2  DipTe  二异丙基碲 
Tris(dimethylamido)gallium(III) Ga(N(CH3)2)3  57731-40-5  TDMAG  三(二甲氨基)镓 
Tris(dimethylamido)antimony(III) C6H18N3Sb 7289-92-1  TDMASb  三(二甲胺)锑 
Tetrakis(diethylamion)hafnium  C8H24HfN4   19962-11-9  TDMAH  四(二甲胺)铪 
Ethanamine, N-methyl-,hafnium(4+) salt (4:1) C12H32HfN4 352535-01-4 TEMAH 四(甲乙胺)铪 
N-methyl-N-[tris(dimethylamino)germyl]methanamine C8H24GaN4 7344-40-3 TDMAGe  四(二甲胺)锗 
Tetrakis(dimethylamino)zirconium C8H24N4Zr 19756-04-8  TDMAZ  四(二甲胺)锆 
Tetrakis(ethylmethylamino)zirconium C12H32N4Zr 175923-04-3  TEMAZ  四(甲乙胺)锆 
N-methyl-N-[tris(dimethylamino)stannyl]methanamine  C8H24N4Sn  1066-77-9  TDMASn  四(二甲胺)锡 
Tetrakis(dimethylamino)titanium  C8H24N4Ti   3275-24-9  TDMAT  四(二甲胺)钛 
Ethyl(methyl)azanide,titanium(4+) C12H32N4Ti 308103-54-0 TEMAT  四(甲乙胺)钛 
Tetrakis(ethylmethylamino)vanadium C12H32N4V 791114-66-4 TEMAV  四(甲乙胺)钒 
Tantalum(5+) ethanolate C10H30O5Ta 6074-84-6 PETOTa 乙氧基钽
Pentakis(dimethylamino)tantalum(V) C10H30N5Ta 19824-59-0  PDMATa 五(二甲胺)钽
Ferrocene C10H10Fe 102-54-5 FeCp2 二茂铁 
Magnesocene C10H10Mg 1284-72-6 MgCp2 二茂镁
Manganocene C10H10Mn 73138-26-8 MnCp2 二茂锰 
Nickelocene C10H10Ni  1271-28-9  NiCp2 二茂镍 
Ruthenocene C10H10Ru  1287-13-4  RuCp2 二茂钌 
Cobaltocene (η5-C5H5)2Co 1277-43-6 CoCp2 二茂钴
bis(methylcyclopentadienyl)magnesium C12H14Mg 40672-08-0 Mg(MeCp)2 二甲基二茂镁 
Bis(ethylcyclopentadienyl)magnesium C14H18Mg 114460-02-5 Mg(EtCp)2 二乙基二茂镁 
1,1'-Diethylmanganocene C14H18Mn 101923-26-6 Mn(EtCp)2  二乙基二茂锰 
Bis(ethylcyclopentadienyl)ruthenium C7H9RuC7H9 32992-96-4 Ru(EtCp)2 二乙基二茂钌 
(Trimethyl)methylcyclopentadienylplatinum(IV) C9H16Pt 94442-22-5 (MeCp)Pt(CH3)3 三甲基甲基环戊二烯基铂 
Lithium Dipivaloylmethanate C11H19LiO2 22441-13-0 Li(thd)  (四甲基庚二酮)锂 
(2,2,6,6-Tetramethyl-3,5-heptanedionato)silver C11H19AgO2 79827-25-1  Ag(thd) (四甲基庚二酮)银 
Copper(II) hexafluoroacetylacetonate hydrate Cu(C5HF6O2)2 155640-85-0   Cu(hfac)2 二(六氟戊二酮)铜 
Palladium(II)hexafluoro-2,4-pentanedionate C10H8F18O4Pd 64916-48-9 Pd(hfac)2 二(六氟乙酰丙酮)钯
Iridium(III)2,4-pentanedionate C15H21IrO6 15635-87-7 Ir(acac)3  三(乙酰丙酮)铱 
Neodymium-thd C33H60NdO6 15492-47-4 Nd(thd)3 三(四甲基庚二酮)钕
Tris(2,2,6,6-tetramethyl-3,5-heptanedionato)ytterbium(III) C33H57O6Yb 15492-52-1 Yb(thd)3 三(四甲基庚二酮)镱
Tetrakis(tetramethylheptanedionato)cerium C22H38CeO4  18960-54-8 Ce(thd)4 四(四甲基庚二酮)铈
Tris(2,2,6,6-tetramethyl-3,5-heptanedionato)lanthanum(III)  C33H57LaO6  14319-13-2 La(thd)3 三(四甲基庚二酮)镧 
Tris(tetramethylcyclopentadienyl)lanthanum  C27H39La 148607-23-2 La(MeCp)3 甲基环戊二烯镧
Bis(trimethylsilyl)azanide,lanthanum(3+) C18H54LaN3Si6 175923-07-6 La(TMSA)3 三(二(三甲硅)胺)镧
Lead(II)-2,2,6,6-tetramethyl-3,5-heptanedionate  C22H38O4Pb  21319-43-7 Pb(thd)2  二(四甲基庚二酮)铅 
Bismuth III Tetramethylheptanedionate C33H57BiO6 142617-53-6 Bi(thd)3  三(四甲基庚二酮)铋 
Erbium-DPM C33H57ErO6 34750-80-6 Er(thd)3  三(四甲基庚二酮)铒 
Tris(2,2,6,6-Tetramethyl-3,5-Heptanedionato)Yttrium(III)  C33H57O6Y  15632-39-0 Y(thd)3 三(四甲基庚二酮)钇 
Bis(N,N'-di-i-propylacetamidinato)cobalt(II) (C8H17N2)2Co 635680-58-9 Co(iPr-MeAMD)2 二(N,N’-二异丙基乙脒基)钴
Bis(N,N'-diisopropylacetamidinato) Nickel (II) (C8H17N2)2Ni 635680-62-5 Ni(iPr-MeAMD)2 二(N,N’-二异丙基乙脒基)镍
lanthanum tris(N,N'-diisopropylacetamidinate) (C8H17N2)3La 635680-72-7 La(iPr-MeAMD)3 三(N,N’-二异丙基乙脒基)镧
Yttrium tris(N,N'-diisopropylacetamidinate) (C8H17N2)3Y   Y(iPr-MeAMD)3 三(N,N’-二异丙基乙脒基)钇
Molybdenum hexacarbonyl Mo(CO)6 13939-06-5 Mo(CO)6 六羰基钼
(Trimethyl)methylcyclopentadienylplatinum (IV) C9H16Pt 94442-22-5 Me3Pt(MeCp) 三甲基甲基环戊二烯铂
Tris(methylcyclopentadienyl)yttrium(III) C18H21Y 329735-72-0 Y(MeCp)3 甲基环戊二烯钇
Indium,(h5-2,4-cyclopentadien-1-yl)- C5H5In  34822-89-4 InCp 环戊二烯基铟 
Tin(IV) chloride Cl4Sn  7646-78-8  Cl4Sn 四氯化锡 
Titanium(IV) isopropoxide C12H28O4Ti  546-68-9 TIPT  四异丙醇钛
Niohium pentaethnxidc Nb(OC2H5)5 3236-82-6 PETONb 乙氧基铌
Lithium t-butoxide C4H9LiO 1907-33-1 TBOLi 叔丁醇锂 
Iron t-butoxide C12H27FeO3 620945-29-1 3TBOFe 叔丁醇铁
GALLIUM (III) ISOPROPOXIDE C9H21GaO3  4452-61-3 TPGa 三异丙氧基镓
Titanium tetrachloride TiCl4 7550-45-0 TiCl4 四氯化钛
Carbon tetrachloride CCl4 56-23-5 CCl4 四氯化碳
Carbon tetrabromide CBr4 558-13-4 CBr4 四溴化碳
Pentachloropyridine  C5Cl5N 2176-62-7 PCP 五氯吡啶
boride compound B compound   AMY-B-330 硼化合物
Germanium(Ⅳ) methoxide C4H12GeO4 992-91-6   甲氧基锗

硅基化合物
英文名 化学式 CAS号 别名 中文名
Bis(t-butylamino)silane  ([NH(C4H9)]2SiH2) 186598-40-3 BTBAS 双(叔丁基氨基)硅烷
Tris(dimethylamino)silane C6H19N3Si 15112-89-7  3DMAS 三(二甲氨基)硅烷
N,N-Disilylsilanamine H9NSi3 13862-16-3 TSA (N,N-二硅烷基-硅烷胺)
Bis(diethylamino)silane C8H22N2Si 27804-64-4 BDEAS(SAM24) 双(二乙胺基)硅烷
Diisopropylaminosilane C6H17NSi 908831-34-5 DIPAS(LTO-520) 二(异丙氨基)硅烷
Tetraethyl Orthosilicate C8H22N2Si 1978/10/4 TEOS 原硅酸乙酯
Hexachlorodisilane Si2Cl6 13465-77-5 HCDS 六氯乙硅烷
Bis(trimethylsilyl)azanide,gadolinium(3+) C18H54GdN3Si6 35789-03-8 Gd(TMSA)3 三(二(三甲硅)胺)钆 

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